Installation of ion-plasma (magnetron) deposition. Part 1
Hello restless minds. Today we will talk about the installation of magnetron sputtering, fully designed and manufactured by yourself.
For a start, I will briefly try to answer what these installations are for and what is ion plasma spraying.
The target is the material that is sprayed.
The substrate is this, then what is spraying.
')
Installations of this kind make it possible to form the thinnest layers of conductive materials (mainly metals) on substrates. Both conductive and dielectric material can be used as substrates. And in order to form a nanolayer, for example, of any metal on the substrate, it is first necessary to attack the metal properly with plasma-forming ions, for this purpose, glow plasma discharge under reduced pressure and magnetron are used as an electron trap.
Let's look at the simplest scheme of a magnetron and its work, and you will understand why it is a trap (I will try without much scientific knowledge, but I think that many will be against it, since some moments cannot be explained without this, but I will try).
The classical glow discharge lights up at a constant current, and the current flows from the anode to the cathode. The cathode is a flat target, under which is a ring magnet. The electrons flying from the cathode ionize the gas in the volume, the ions of which fall into the target, from it knock out atoms that again collide with the electrons, thereby part of them is ionized ... thereby the magnet holds the electrons and at the same time the formation of atoms increases, which are deposited on the substrate, thereby forming the film.
And now from theory to practice. Since I am engaged in various plasma-chemical technologies at atmospheric pressure, then over time there was an interest in reduced pressure. I already had a power source of a glow discharge, I made it a long time ago. And after buying a vacuum pump, experiments began, which revealed some difficulties when working with low pressure.
Summing up this part of the article, we can say that the work is moving, we get a lot of experience and additional knowledge. At the moment, the body is ready in the gland, it will be painted, after which the assembly will begin.
I did not specifically inflate the article, because in the commercials many questions are highlighted, and if not, then in the comments I will try to answer everything.
For a start, I will briefly try to answer what these installations are for and what is ion plasma spraying.
The target is the material that is sprayed.
The substrate is this, then what is spraying.
')
Installations of this kind make it possible to form the thinnest layers of conductive materials (mainly metals) on substrates. Both conductive and dielectric material can be used as substrates. And in order to form a nanolayer, for example, of any metal on the substrate, it is first necessary to attack the metal properly with plasma-forming ions, for this purpose, glow plasma discharge under reduced pressure and magnetron are used as an electron trap.
Let's look at the simplest scheme of a magnetron and its work, and you will understand why it is a trap (I will try without much scientific knowledge, but I think that many will be against it, since some moments cannot be explained without this, but I will try).
The classical glow discharge lights up at a constant current, and the current flows from the anode to the cathode. The cathode is a flat target, under which is a ring magnet. The electrons flying from the cathode ionize the gas in the volume, the ions of which fall into the target, from it knock out atoms that again collide with the electrons, thereby part of them is ionized ... thereby the magnet holds the electrons and at the same time the formation of atoms increases, which are deposited on the substrate, thereby forming the film.
And now from theory to practice. Since I am engaged in various plasma-chemical technologies at atmospheric pressure, then over time there was an interest in reduced pressure. I already had a power source of a glow discharge, I made it a long time ago. And after buying a vacuum pump, experiments began, which revealed some difficulties when working with low pressure.
Summing up this part of the article, we can say that the work is moving, we get a lot of experience and additional knowledge. At the moment, the body is ready in the gland, it will be painted, after which the assembly will begin.
I did not specifically inflate the article, because in the commercials many questions are highlighted, and if not, then in the comments I will try to answer everything.
Source: https://habr.com/ru/post/402197/
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